We have more than 25 years of experience in electrostatic chucks for silicon wafers and other various materials. To solve your complex problems, we listen to your specifications and its intended use before proposing solutions not only for the electrostatic chucks but also its related peripheral components to optimize use.

Please feel free to consult us from trial production to mass production, as we also provide individual support from new development to improvement of existing products (improvement of functions and extended life).